High-Resolution Soft-X-Ray Projection Imaging,

Abstract

The principal motivation for carrying out projection imaging with soft-x-rays instead of with visible or ultraviolet light lies in the dramatic improvement in resolution that can be obtained (while maintaining a usable depth of focus). Although there are many reports of soft-x-ray imaging in the literature , soft-x ray imaging with truly high resolution has only recently been demonstrate. In this talk we describe the results of several experiments which have demonstrated projection imaging in the soft-x-ray spectral region with a resolution approaching the Rayleigh limit.

Document Details

Document Type
Technical Report
Publication Date
May 22, 1992
Accession Number
ADP007226

Entities

People

  • J. Bokor
  • J. E. Bjorkholm
  • L. Eichner
  • O. R. Wood Ii
  • R. R. Freeman

Tags

DTIC Thesaurus Topics

  • California
  • Electromagnetic Radiation
  • High Resolution
  • Ionizing Radiation
  • Literature
  • Lithography
  • Motivation
  • Photolithography
  • Radiation
  • Soft X Rays
  • X Rays

Fields of Study

  • Physics

Readers

  • Image Processing and Computer Vision.
  • Medical Imaging.
  • Systems Analysis and Design