Soft-X-Ray Projection Lithography System Design,

Abstract

A baseline design for a Soft X-Ray Projection Lithography (SXPL) system is presented. This design is intended to serve as a starting point, and provide an overview of the likely form and structure of a SXPL prototype. Technical performance specifications for system components are presented along with analyses supporting the specification choices.

Document Details

Document Type
Technical Report
Publication Date
May 22, 1992
Accession Number
ADP007227

Entities

People

  • A. M. Hawryluk
  • N. M. Ceglio

Organizations

  • Lawrence Livermore National Laboratory

Tags

DTIC Thesaurus Topics

  • California
  • Electromagnetic Radiation
  • Ionizing Radiation
  • Lithography
  • Photolithography
  • Prototypes
  • Radiation
  • Soft X Rays
  • Specifications
  • X Rays

Fields of Study

  • Physics

Readers

  • Nanofabrication and Microfabrication.
  • Software Engineering.