Laser-Produced Plasma Soft-X-Ray Generation,

Abstract

The efficiency of soft x-ray production from laser-irradiated plasmas is simulated for two different spectral regions. These two regions, 14A +/- 15% and 130A-, 1 %, were chosen for proximity mask or point projection technological applications. Relatively large conversion efficiencies were obtained from irradiation of a stainless steel target using the conditions suggested by recent Hampshire Instruments' experiments for proximity masking. Pulse-width and laser frequency parameter studies were performed for point-projection applications which suggest that the conversion efficiency is sensitive to pulse-width but not to laser frequency.

Document Details

Document Type
Technical Report
Publication Date
May 22, 1992
Accession Number
ADP007243

Entities

People

  • C. Cerjan
  • M. D. Rosen

Organizations

  • Lawrence Livermore National Laboratory

Tags

DTIC Thesaurus Topics

  • California
  • Conversion
  • Demographic Cohorts
  • Efficiency
  • Electromagnetic Radiation
  • Frequency
  • Ionizing Radiation
  • Lithography
  • Photolithography
  • Production
  • Radiation
  • Soft X Rays
  • Stainless Steel
  • X Rays

Fields of Study

  • Physics

Readers

  • Combustion Dynamics and Shock Wave Physics.
  • Nanofabrication and Microfabrication.
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Directed Energy