Achieving Uniform Multilayer Coatings on Figured Optics,

Abstract

We discuss design considerations for high-reflectance multilayer coatings for use in soft X-ray projection lithography optical systems. Techniques used to control and characterize coating uniformity on figured optics are described. Recent results are presented.

Document Details

Document Type
Technical Report
Publication Date
May 22, 1992
Accession Number
ADP007248

Entities

People

  • D. L. Windt
  • J. E. Bjorkholm
  • L. Eichner
  • R. R. Freeman
  • W. K. Waskiewicz

Tags

DTIC Thesaurus Topics

  • California
  • Electromagnetic Radiation
  • Ionizing Radiation
  • Lithography
  • Optics
  • Photolithography
  • Radiation
  • Reflectance
  • Soft X Rays
  • X Rays

Fields of Study

  • Physics

Readers

  • Nanofabrication and Microfabrication.
  • Optical Physics and Photonics.