Tungsten/Carbon Multilayers Prepared by Ion-Beam Sputtering,

Abstract

Tungsten/carbon(W/C) multilayers were prepared by ion beam sputtering. The properties of the multilayers were studied by low-angle x-ray diffraction, transmission electron microscopy (TEM) observation of the cross section and Auger electron spectroscopy. It was found that carbon atoms diffused into the tungsten layers and formed carbide. The measured reflectivity was in good agreement with the calculation, considering the decrease in density and the interfacial roughness. The multilayers were deposited on a concave spherical mirror and x-rays were focused by the mirror on a line-shaped image.

Document Details

Document Type
Technical Report
Publication Date
May 22, 1992
Accession Number
ADP007249

Entities

People

  • Hideo Nikaido
  • Hiroshi Nakamura
  • Katsuhiko Murakami
  • Tetsuya Oshino

Organizations

  • Nikon

Tags

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Diffraction
  • Electron Microscopy
  • Electron Spectroscopy
  • Electrons
  • Ion Beams
  • Low Angles
  • Microscopy
  • Photolithography
  • Soft X Rays
  • Spectra
  • Spectroscopy
  • Transmission Electron Microscopy
  • X Rays
  • X-Ray Diffraction

Fields of Study

  • Physics

Readers

  • Fluid Dynamics.
  • Nanofabrication and Microfabrication.
  • Powder metallurgy of Titanium alloys.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene