Effect of Amplitude and Phase Dispersion on Images in Multilayer-Coated Soft-X-Ray Projection Systems,

Abstract

The effect of reflectance variation and phase dispersion introduced by multilayer coatings on the image quality for different types of soft x-ray projection systems is investigated.

Document Details

Document Type
Technical Report
Publication Date
May 22, 1992
Accession Number
ADP007251

Entities

People

  • Tanya E. Jewell

Tags

DTIC Thesaurus Topics

  • Amplitude
  • California
  • Dispersions
  • Electromagnetic Radiation
  • Ionizing Radiation
  • Lithography
  • Photolithography
  • Radiation
  • Reflectance
  • Soft X Rays
  • X Rays

Fields of Study

  • Physics

Readers

  • Image Processing and Computer Vision.
  • Nanofabrication and Microfabrication.