Nonspecular Scattering from X-Ray Multilayer Structures,

Abstract

Measurements of non-specular x-ray scattering from a W/C multilayer structure are presented which demonstrate that in-plane heterogeneities exist in high quality multilayer structures on high quality substrates. Certain features of the non-specular scattering are presented and discussed. The implications of these observations for soft x-ray imaging using multilayer-coated focussing mirrors are discussed.

Document Details

Document Type
Technical Report
Publication Date
May 22, 1992
Accession Number
ADP007256

Entities

People

  • J. B. Kortright

Organizations

  • University of California, Berkeley

Tags

Communities of Interest

  • Air Platforms

DTIC Thesaurus Topics

  • Electromagnetic Scattering
  • Lithography
  • Photolithography
  • Scattering
  • Soft X Rays
  • X Ray Scattering
  • X Rays

Fields of Study

  • Physics

Readers

  • Electromagnetic Wave Scattering and Antenna Radiation Engineering
  • Nanofabrication and Microfabrication.