National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,

Abstract

We describe the capabilities of the existing NIST soft X-ray reflectometry program and outline our proposed new characterization facility.

Document Details

Document Type
Technical Report
Publication Date
May 22, 1992
Accession Number
ADP007257

Entities

People

  • D. L. Ederer
  • M. Isaacson
  • R. N. Watts
  • T. B. Lucatorto

Organizations

  • National Institute of Standards and Technology

Tags

DTIC Thesaurus Topics

  • California
  • Electromagnetic Radiation
  • Ionizing Radiation
  • Lithography
  • Metrology
  • Photolithography
  • Radiation
  • Reflectometry
  • Soft X Rays
  • Standards
  • X Rays
  • X-Ray Reflectometry

Fields of Study

  • Physics