Comparison of Oxygen Ion- and Proton-Implanted GaAs Photoconductive Switches,
Abstract
Oxygen ion and proton implanted GaAs photoconductive (PC) switches which can be used for on-wafer characterization of GaAs MMIC's have been evaluated. The Oxygen switch performed better in terms of switch sensitivity and bandwidth. It has been used to measure the S-parameter of a 3 stage 12 GHz MMIIC amplifier. A good agreement between the PC sampling technique and the network analyzer was achieved up to a 40 db dynamic range.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 22, 1992
- Accession Number
- ADP007678
Entities
People
- Chihhi Lee
- Eve A. Chauchard
- Sheng-lung L. Hung
- Thane Smith
- Timothy T. Lee
Organizations
- University of Maryland