Characterization of Silicon Nitride Synthesized By Microwave Heating,

Abstract

Recently, a new procedure was developed for the nitridation of high purity silicon via microwave heating. Silicon samples were processed to various stages of nitridation utilizing microwave heating and then analyzed by X-ray diffraction and by scanning electron microscopy. These data were compared to that obtained from samples nitrided by conventional heating methods.

Document Details

Document Type
Technical Report
Publication Date
Apr 27, 1992
Accession Number
ADP007753

Entities

People

  • C. R. Hubbard
  • H. D. Kimrey
  • J. O. Kiggans
  • R. R. Steele

Organizations

  • Oak Ridge National Laboratory

Tags

DTIC Thesaurus Topics

  • Absorbers (Materials)
  • Advanced Materials
  • Ceramic Materials
  • Diffraction
  • Electron Microscopy
  • Engineered Materials
  • Materials
  • Materials Processing
  • Microscopy
  • Microwaves
  • Scanning Electron Microscopy
  • X Rays
  • X-Ray Diffraction

Readers

  • Materials Science and Engineering.
  • Metallurgy
  • Microwave Engineering.

Technology Areas

  • Microelectronics