Scanning Scattering Microscope: A Novel Optical Technique for Imaging Surface Microtopography,
Abstract
The Scanning Scattering Microscope (SSM) 1 can produce two-dimensional, high resolution micrographs of very small surface features and surface microtopography; this optical technique is very sensitive to surface roughness, surface and near-surface damage, and individual surface defects. Its present lateral resolution of about 5 um is augmented by an extremely high sensitivity to surface roughness of about 2 nm.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 22, 1992
- Accession Number
- ADP007934
Entities
People
- Denes Marton
- Joseph Fine
Organizations
- National Institute of Standards and Technology