Photoluminescence Mapping: New Technique to Characterize Materials and Structures for Fabrication of Photonic Devices,

Abstract

Since the fabrication of photonic devices is a complex and expensive process it is highly desirable to characterize both starting material and device structures after each step of technological Process. The ideal candidate which meets the production and research criteria is photoluminescence mapping technique. In this paper we describe apparatus for measuring photoluminescence over the entire wafer and discuss a number of applications of this technique.

Document Details

Document Type
Technical Report
Publication Date
Jul 01, 1992
Accession Number
ADP007974

Entities

People

  • Jacek Ornoch
  • Maciej Bugajski

Organizations

  • Institute of Electron Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Circuits
  • Compound Semiconductors
  • Electronics
  • Fabrication
  • Integrated Circuits
  • Materials
  • Metal Oxide Semiconductors
  • Optoelectronic Devices
  • Photoluminescence
  • Photonic Devices
  • Production
  • Semiconductors
  • Solid State Electronics

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology
  • Systems Analysis and Design