Electron-beam Writing System for Holographic Optical Elements,

Abstract

A highly accurate and versatile electron-beam(EB) writing system suitable for fabrication of holographic optical elements (HOEs) with arbitrary patterns is developed. New HOEs with multiple functions are successfully fabricated by the EB system, and their unique applications are introduced.

Document Details

Document Type
Technical Report
Publication Date
Jul 01, 1992
Accession Number
ADP007991

Entities

People

  • Fumihiro Sogawa
  • Makoto Kato
  • Yoshikazu Hori

Tags

DTIC Thesaurus Topics

  • Circuits
  • Compound Semiconductors
  • Electron Beams
  • Electronics
  • Electrons
  • Fabrication
  • Holographic Optical Elements
  • Integrated Circuits
  • Metal Oxide Semiconductors
  • Optoelectronic Devices
  • Semiconductors
  • Solid State Electronics

Fields of Study

  • Physics

Readers

  • Nanofabrication and Microfabrication.
  • Optical Physics and Photonics.

Technology Areas

  • Directed Energy
  • Microelectronics