Open Tube Double Diffusion for the Fabrication of Bipolar Transistor Waveguide Optical Switch,

Abstract

Experimental results of a new method for the double diffusion into GaAs in an open tube have been presented. New techniques developed for the low concentration Zn diffusion at relatively higher values of the temperature and high concentration Sn diffusion in an open tube system can be convenient for the fabrication of bipolar transistor waveguide optical switches and other self-aligned bipolar devices needed for photonic integrated circuits.

Document Details

Document Type
Technical Report
Publication Date
Jul 01, 1992
Accession Number
ADP007999

Entities

People

  • D. K. Gautam
  • K. Tada
  • Y. Nakano

Organizations

  • University of Tokyo

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Bipolar Junction Transistors
  • Circuits
  • Diffusion
  • Fabrication
  • Integrated Circuits
  • Optoelectronic Devices
  • Photonic Integrated Circuits
  • Semiconductor Devices
  • Semiconductors
  • Transistors
  • Waveguides

Fields of Study

  • Physics

Readers

  • Electronics Engineering
  • Microwave Engineering.
  • Semiconductor Device Technology