Diffusion Behavior of Metal-Carbon Multilayers,

Abstract

The effect of annealing on the X-ray optical characteristics of artificial multilayer structures composed of metal (Cr,Fe,Ni,Mo,Rh, W,Pt and others) and carbon is studied. To analyze the changes at annealing a small-angle X-ray diffraction was used. The observed X-ray reflectivity enhancement can be explained by the uphill diffusion of metal atoms.

Document Details

Document Type
Technical Report
Publication Date
Mar 05, 1992
Accession Number
ADP008024

Entities

People

  • A.a. Fraerman
  • A.d. Akhsakhalyan
  • N.i. Polushkin
  • N.n. Salashchenko
  • Yu. Ya. Platonov

Tags

DTIC Thesaurus Topics

  • Annealing
  • Diffraction
  • Diffusion
  • Reflectivity
  • Wave Phenomena
  • X Rays
  • X-Ray Diffraction
  • X-Ray Reflectometry

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Nanofabrication and Microfabrication.