Study of Ultra-Thin Films in Multilayer Structures by Standing-Waves and Small-Angle X-Ray Scattering Techniques,
Abstract
The traditional method for LSM parameters investigation uses small angle x-ray diffraction at Lambda = 0.lnm. The parameters of interest have been determined by comparing the theoretical angular dependencies of reflectivity as a function of these parameters with the experimental curves. In this paper we discuss the possibilities of solving the inverse problem, i.e. the electron density or permittivity distribution have been determined directly from the small angle x-ray diffraction spectra. Also new possibilities of ultrathin film thickness and density determination are demonstrated by means of x-ray method in form of x-ray standing wave technique (XSW) and total external fluorescence study (NTEF).
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 05, 1992
- Accession Number
- ADP008028
Entities
People
- A.v. Shubnikov
- I.v. Bashelhanov
- M.v. Kovalchuk
- N.n. Novikova
- S.i. Zheludeva