Roughness Evolution in Films and Multilayer Structures,
Abstract
Structures fabricated from multiple layers of very thin films make up an increasing component of our high-technology base in electronics, photonics, and x-ray optics. In particular, in x-ray optics, quite dissimilar materials are combined to create what are effectively one-dimensional diffraction gratings, in which the layers must have indices of refraction that are as different as possible. But that feature alone is not enough. The interfaces between the different layers affect the quality of the structure as an x-ray reflector, bringing into consideration questions of crystal growth and the kinetic and thermodynamic mechanisms of growth. This paper provides an overview of the most important kinetic mechanisms that control growth and illustrates then with scanning tunneling microscopy (STM) and diffraction measurements.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 05, 1992
- Accession Number
- ADP008038
Entities
People
- M.g. Lagally
Organizations
- University of Wisconsin–Madison