Surface Roughness and X-Ray Scattering,

Abstract

Interface roughness and diffusion limit the performance of x-ray multilayer (ML) stacks by generating unwanted scattering and reducing their efficiencies. A number of routines for evaluating these effects are described in the literature. Their development involves two steps: the modelling of the properties of a single interface, and the combination of the effects of many interfaces to determine the performance of the stack. Our discussion here is concerned principally with the first step, the critical single-interface part of the problem.

Document Details

Document Type
Technical Report
Publication Date
Mar 05, 1992
Accession Number
ADP008043

Entities

People

  • E.l. Church
  • P.z. Takacs

Organizations

  • United States Army Armament Research, Development and Engineering Center

Tags

DTIC Thesaurus Topics

  • Diffusion
  • Efficiency
  • Electromagnetic Scattering
  • Literature
  • Physical Properties
  • Roughness
  • Scattering
  • Surface Properties
  • Surface Roughness
  • X Ray Scattering
  • X Rays

Readers

  • Materials Science and Engineering.
  • Nanofabrication and Microfabrication.
  • Systems Analysis and Design