A Soft X-Ray and Extreme U.V. Reflectometer Using a Laser Produced Plasma Source and a High Throughput Monochromator,
Abstract
Measurement in the soft x-ray and extreme ultraviolet regions of the spectrum have historically been hampered by the lack of bright, tunable source. Although synchrotron radiation sources are gradually filling this need, such facilities are not sufficiently compact and inexpensive to be within the reach of an average laboratory. The commercial availability of compact, inexpensive pulsed lasers has changed this picture. The high temperature plasma produced when the light from such a laser is focused upon a suitable metal or dielectric target emits x-rays and extreme ultraviolet radiation that can either be a rich line spectrum or a smooth and intense continuum, depending upon the target material. Such a source needs only monochromatization to make it useful for a wide variety of measurements and calibrations.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 05, 1992
- Accession Number
- ADP008054
Entities
People
- E.m. Gullikson
- J.h. Underwood
- P.c. Batson
- Viktor Nikitin
Organizations
- University of California, Berkeley