Preparation and Characterization of Platinum-Carbon Multilayers,
Abstract
Development of platinum-carbon(Pt/C) multilayers is aimed at applying to grazing incidence x-ray optical systems such as x-ray telescope, x-ray microscope and x-ray beamline optics of synchrotron radiation. Pt/C multilayers were synthesized on a float glass, silicon wafer and laminar grating by an electron beam deposition method. The thickness(2d) and number(N) of layer pairs are 50-150A and 525, respectively. The thickness ratio of Pt to C was 1/2 and 1/1. The temperature of substrates during the deposition was controlled at liquid nitrogen(LN2), room-temperature or 100 deg C. The x-ray reflectivity measurement was carried out in the energy range 0.9-8keV by using characteristic x-rays of Cu-K a and Al-Ka and monochromatized synchrotron radiation at UVSOR, Institute for Molecular Science. A thin window proportional counter was used for all these measurements. The detailed description of reflectivity measurement system is given by Yamashita et all.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 05, 1992
- Accession Number
- ADP008055
Entities
People
- G.s. Lodha
- I. Hatsukade
- K. Yamashita
- M. Ohtani
- T. Suzuki
Organizations
- Nikon