Bragg-Fresnel Multilayer Optics for X-Ray Microscopy and Spectroscopy,
Abstract
Application of metallic multilayer mirrors for construction of different components of x-ray optical schemes became more and more frequent. Number of publications gives an example of objective lenses, monochromators, focusing and imaging devices, based on figured multilayer mirrors. One of the most exited application of such optics in future can be projection X-ray lithography and local analyses of microstructures with submicron resolution for microelectronics technology. Recently, focusing and imaging by the use of some kinds of grooved diffraction optics on flat surfaces instead of the curved substrate had been reported in several papers . This optics is now known as Bragg-Fresnel Multilayer Optics (BFMO). Compared to grazing incidence optics and figured multi optics, BFMO can provide higher spatial and spectral resolutions. That is say, till to spot value up to 0.1m spatial resolution of BFMO is limited only by the flatness of the plane substrate and accuracy of the lithographic process.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 05, 1992
- Accession Number
- ADP008062
Entities
People
- A. Erko
- B. Vidal
- D. Rochtchoupkine
- J. Susini
- M. Brunel
Organizations
- National Center for Scientific Research