Status of the Soft X-Ray/XUV Optical Metrology Program at the National Institute of Standards and Technology,
Abstract
The National Institute of Standards and Technology (NIST) has initiated a program devoted to the characterization of soft x-ray optics at the wavelength of use. Although NIST has an operational XUV characterization facility which it is using to make measurements for users across the country, that facility suffers from several deficiencies that will limit its usefulness in the coming years. Therefore, we are constructing an improved monochromator/ reflectometer beamline that will upgrade and extend our XUV measurement capabilities. We will describe the optical properties of the new monochromator and discuss the state of the design of the the new reflectometer. The monochromator is based on a varied line spaced plane grating that uses simple optical elements in a fixed entrance slit/fixed exit slit geometry. Important features of the new instrument include high throughput, simple wavelength scanning resolutions in excess of 1000, and the ability to characterize large (in excess of 30 cm diameter) optical surfaces with small radii of curvature.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 05, 1992
- Accession Number
- ADP008068
Entities
People
- Charles Tarrio
- David Ederer
- Richard Watts
- Thomas Lucatorto
Organizations
- National Institute of Standards and Technology