Imaging X-Ray Multilayer Structures with Cross-Sectional HREM,
Abstract
High-resolution electron microscopy (HREM), with a resolution below 2A, is the best tool for observing the actual detailed structure for ML. This gives direct atomic scale information about the film structure, including the bilayer thickness, the crystalline structure and the roughness of the individual layers and the interlayers. In order to maximize the contrast, the HREM images of multilayers are typically recorded with the objective lens close to the Scherzer defocus. For the JEM-4000EX microscope used in this study, the Scherzer defocus is -320A below the in focus position. The question has been raised as to how trustworthy are the multilayer micrographs and in particular how sensitive are the observed multilayer parameters to different defocus conditions of the objective lens. Further questions concern the effects due to the orientation of the cross-sectional specimen. The specimen is usually aligned with a double-tilt sample holder to the edge-on orientation so that the specimen is viewed with the electron beam direction parallel to the layers as well as to one of the zone axes of
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 05, 1992
- Accession Number
- ADP008070
Entities
People
- D.g. Stearns
- D.j. Smith
- M.b. Stearns
- Yan Cheng
Organizations
- Arizona State University