Micro-Mechanical Structures as Integrated Optical Sensor Elements,
Abstract
As optical channel waveguides and part of sensor circuits, micro-mechanical cantilevers and bridges have been fabricated upon Si substrates. The waveguides have a sandwiched layer structure of SiO(2)/Al(2)O(3)/SiO(2) and possess very good optical wave-guiding properties. Typical dimensions of such channel waveguides are 25-200 micron in length, 5-30 micon in width, about 2.5 micron in thickness and 10 micron in the separation distance between waveguide and substrate. Such micro-mechanical structures provide new possibilities to realize integrated optical transducer components for detecting force-related quantities such as sound, vibration and acceleration. Shifts at a cantilever's free end or bending of a bridge will change the out coupled beam in relation to the driving forces.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1992
- Accession Number
- ADP008137
Entities
People
- H. J. Frankena
- Siliang Wu
Organizations
- Delft University of Technology