Plasma Micromachined MEMS for Intelligent Diagnostic Sensors
Abstract
Microelectromechanical Systems (MEMS) is a new technology rapidly gaining in commercial acceptance. In MEMS, integrated circuit processing technology is utilized to fabricate silicon microstructures that are released from the underlying substrate such that they are free to move in one or more dimensions. This technology therefore enables the integration of mechanical and electronic components in a single integrated circuit style device. MEMS is an ideal technology for intelligent diagnostic sensor applications. It provides the capability for high resolution sensors for a variety of physical phenomena (e.g.,, pressure and acceleration) in a small package with integrated electronics. In volume production, MEMS devices can reach low unit costs enabling large arrays of such devices to be used in practical industrial monitoring applications. On-chip electronics increases device intelligence as well as offering the possibility of remote sensing and local decision making. TMS Technologies' proprietary plasma micromachining technology offers superior performance and reduced manufacturing costs when compared to other MEMS processes in use at the present time. It is hoped that cost effective machine diagnostic sensors can be developed by bringing the capabilities of plasma micromachining to the attention of the failure prevention community through forums such as the 1996 Technology Showcase.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1996
- Accession Number
- ADP010206
Entities
People
- Gregory J. Galvin
- Timothy J. Davis