Generalized Ellipsometry Using a Rotating Sample
Abstract
We proposed a generalized ellipsometric technique using a rotating sample. The ellipsometer consists of a polarizer, a rotatable sample holder, an analyzer, and a detector. Fourier coefficients are measured and used to extract the system's dielectric tensors and film thicknesses. The main advantage of the technique is that all parts of the ellipsometer are fixed except the sample, whose azimuth angle can be modulated. We show calculated responses to isotropic and anisotropic materials as well as superlattices. Potential applications for characterizations of anisotropic nanostructures are discussed.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2001
- Accession Number
- ADP011030
Entities
People
- Lowell T. Wood
- Terry D. Golding
- Weiliang Xu
Organizations
- University of Houston