Low-Coherence Interference Microscopy at High Numerical Apertures
Abstract
A white-light Linnik interference microscope using high numerical aperture optics has been constructed. The system uses a tungsten halogen source and Koehler illumination with separate control over field and aperture stops, so that experiments can be conducted with a range of different operating conditions. Infinity tube length objectives are used in the two arms. Images are recorded with a CCD camera. Different algorithms have been investigated for extraction of information from the image data. These are based on phase stepping, which is achieved based on the principle of the geometric phase, using a polarizing beam splitter, a quarter wave plate and a rotating polarizer. Image information extracted from the visibility of the fringes and also from the phase of the interference fringes has been investigated. Keywords: Low-coherence interferometry, optical coherence tomography, coherence-probe microscope, white-light interferometry, phase-shifting, geometric phase, surface profiling.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 2000
- Accession Number
- ADP011218
Entities
People
- C. J. Sheppard
- Michael J. Roy
- P. Svahn
Organizations
- University of Sydney