Study of 5-Mask TFT Array Process With Low Cost, High Yield and High Performance Characteristics

Abstract

Three types of 5-mask TFT array process have been compared and analyzed their characteristics including TFT performance process window, etc. Results showing here indicate that a 5-mask TFT manufacturing process can be optimized with low cost high production yield and high performance. These properties let the reduced mask TFT array process reveal a much higher potential in mass production.

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Document Details

Document Type
Technical Report
Publication Date
Jul 01, 2000
Accession Number
ADP011321

Entities

People

  • Dou-i Chen
  • I-min Lu
  • Jr-hong Chen
  • Pi-fu Chen
  • Ting-hui Huang

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  • Thin Film Transistors
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