A Monolithic Thermal Inkjet Printhead Combining Anisotropic Etching and Electro Plating
Abstract
The paper proposed a high resolution single-chip monolithic inkjet printhead by combination glowing of nozzle plate on the silicon substrate and anisotropic etching. Ink channels are defined by a sacrificed layer and etched through a mesh network by anisotropic etching. Silicon based channels are strong enough to against the attack of ink solution. Surface planarzation is achieved by using PECVD deposited low stress dielectric film on top of the channels to seal mesh cavities. The heater elements are buried in a thin-sandwiched membrane and face down like a back shooter. Ink slot is formed by Etching the substrate from the backside and channel is then connected with Ink slot. Electrical forming nozzle plate will be done later. In this structure, no more another ink channel material is necessary since it is formed on Si substrate. By direct forming nozzle plate on chip, alignment for bonding nozzle plate and chip could be avoided to cost down.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 01, 2000
- Accession Number
- ADP011361
Entities
People
- Chen Y. Cheng
- Chia-tai Cheng
- Hui-fang Wang
- Je-ping Hu
- Yi-hsuan Lai
Organizations
- Industrial Technology Research Institute