Waveguides Based Upon Chalcogenide Glasses
Abstract
Because of their transparency in the infrared, their high refractive index and their well-known photosensitivity properties, interest in chalcogenide glasses for integrated optics and technological applications related to detection in the IR spectral domain has been growing during the past few years. Our present work is focused on the possibility of integrating chalcogenide glasses in components for two types of applications: spatial interferometry (detection of planets) and environmental metrology (detection of pollutant gases). In both cases, monomode channel or rib waveguides working in the infrared are to be obtained. In this context, first Step of our work has been to optimize the chalcogenide films deposition conditions starting from glasses based on germanium combined with antimony and selenium%, or with arsenic and selenium. Films with good adherence and controlled composition are currently obtained by RF-sputtering and thermal evaporation. Multimode planar chalcogenide waveguides, based on two external Ge(29)As(12)Se(59) and an inner (Ge(21)Sb(18)Se(61) glassy layers deposited on glass or Si/SiO2 substrates, were then fabricated and proved to guide at 1.55 microns. In order to realize channel or rib chalcogenide waveguides, Ar plasma etching and NH4OH chemical etching of the films were also investigating and proved to be encouraging.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 2001
- Accession Number
- ADP011526
Entities
People
- A. Pradel
- C. Vigreux
- M. Ribes
- V. Balan