Formation of Profiled Holographic Diffraction Gratings Using Physicochemical Interaction in As2Se3-Ag System
Abstract
The method of blazed holographic diffraction gratings fabrication by transformation of an original symmetric grating grooves into asymmetric ones using inclined vacuum deposition of silver and additional chemical etching have been developed. As photoresist material for gratings recording light-sensitive chalcogenide glassy As2Se3 layers were used. The shape of grating grooves was determined with an atomic force microscope. Angular and spectral dependencies of the diffraction efficiency of the gratings were found, and a relation between optical features and the grating surface pattern was analyzed.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 2001
- Accession Number
- ADP011529
Entities
People
- E. F. Venger
- I. Z. Indutnyy
- M. V. Sopinskyy
- P. F. Romanenko
Organizations
- National Academy of Sciences of Ukraine