Micromachining and Integration of Terahertz Components

Abstract

Two recent innovations at the University of Virginia have the potential to significantly reduce the cost of terahertz mixers and multipliers. These are the integration of high-quality and low-parasitic GaAs diodes on dielectric substrates and the fabrication of terahertz waveguide circuits by micromachining. This paper reviews the basic fabrication processes and presents the most recent results.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Sep 29, 2000
Accession Number
ADP011763

Entities

People

  • Thomas W. Crowe

Organizations

  • University of Virginia

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Assembly
  • Barometric Pressure
  • Electron Beams
  • Fabrication
  • Frequency
  • Frequency Bands
  • Manufacturing
  • Metal-Semiconductor Junctions
  • Precision
  • Semiconductor Devices
  • Semiconductors
  • Silicon
  • Standards
  • Substrates
  • Technical Information Centers
  • Terahertz Radiation
  • Waveguides

Readers

  • Academic Conference Management
  • Integrated Circuit Design and Technology.