Micromachined Planar Antennas for D-Band Frequencies

Abstract

The fabrication of different planar antenna structures using micromachining techniques is described. The antenna patches are based on thin dielectric HMDSN membranes deposited by plasma polymerization and fabricated by structuring the underlying silicon. Both antennas and CPW-feedlines are composed of two stacked KOH-etched silicon-layers. Different transitions from membrane-based coplanar waveguides to multilayer antenna structures have been fabricated and characterized around 125 GHz

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Document Details

Document Type
Technical Report
Publication Date
Sep 29, 2000
Accession Number
ADP011767

Entities

People

  • Joerg Mueller
  • Karen Duwe
  • Rolf Judaschke
  • Stefanie Hirsch

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Antennas
  • Chemical Etching
  • Couplings
  • D Band
  • Etching
  • Fabrication
  • Frequency
  • Horn Antennas
  • Losses
  • Manufacturing
  • Membranes
  • Radiation
  • Radiation Patterns
  • Substrates
  • Technical Information Centers
  • Test Fixtures
  • Transitions

Readers

  • Electromagnetic Wave Scattering and Antenna Radiation Engineering
  • Nanofabrication and Microfabrication.