Gas Phase Synthesis of Nanostructured Films and Coatings

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2000
Accession Number
ADP011800

Entities

People

  • H. Hahn
  • M. Winterer
  • S. Seifried
  • V. V. Srdic

Organizations

  • Technical University of Darmstadt

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Vapor Deposition
  • Coatings
  • Films
  • Grain Growth
  • Grain Size
  • High Resolution
  • High Temperature
  • Materials
  • Materials Processing
  • Materials Science
  • Mechanical Properties
  • Nanoparticles
  • Partial Pressure
  • Particle Size
  • Particles
  • Phase Diagrams
  • Thin Films

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene