Semiconductor Surface Characterization by Scanning Probe Microscopies

Abstract

Besides the well-known 3-dimensional surface topography, scanning probe methods give access to a whole world of local physical information on solid surfaces. Here, we demonstrate opportunities given by scanning tunnelling spectroscopy (STS) and scanning electrical force microscopy/spectroscopy (SEFM/SEFS). In this paper, we compare the wide-spread UHV-STM/STS technique with ambient SEFM/SEFS. After short description of the methods, some applications to semiconductor surfaces are discussed. Possibly SEFS has a great potential for local electronic spectroscopy in near future.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2001
Accession Number
ADP011896

Entities

People

  • Anne-d. Mueller
  • Falk Mueller
  • Michael Hietschold

Organizations

  • Chemnitz University of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Crystals
  • Electric Fields
  • Electrical Properties
  • Electron Emission
  • Electron Microscopy
  • Electrons
  • Energy Bands
  • High Resolution
  • Microscopes
  • Microscopy
  • Physical Properties
  • Scanning
  • Scanning Electron Microscopy
  • Semiconductors
  • Surface Properties
  • Three Dimensional
  • Topography

Readers

  • Educational Psychology
  • Nanoscale Plasmonic Nanotechnology
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene