Synthesis of Vertically Aligned Carbon Nanofiber Films by RF Magnetron Sputtering
Abstract
The aligned carbon nanofibers were synthesized on Si substrates using RF magnetron sputtering with a hot filament. The hot filament was made of tungsten wire and its temperature was up to 2000 degrees C during the deposition. Nitrogen was used as the sputter gas at a relatively low pressure of 2xlO(exp-2) Torr. The sputtering deposition was carried out at a substrate temperature of 700 degrees C. The nanofibers were grown vertically on the substrates. The diameters and the density of the fibers were about 30-45 nm and 10(exp 9) cm(exp-2), respectively.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 2001
- Accession Number
- ADP012146
Entities
People
- K-y. Lee
- K. Fujimoto
- M. Katayama
- S. Honda
- S. Ohkura
Organizations
- Osaka University