Preparation and Properties of Amorphous Carbon Oxynitrides a-CNxOy Films Made by a Nitrogen Radical Sputter Method and by the Layer-by-Layer Method

Abstract

We have tried to prepare amorphous carbon oxynitrides (a-CN(x)O(y)) films by the oxygen radical treatment (ORT) of amorphous carbon nitrides (a-CN(x)) and also by the layer-by-layer method. Properties of a-CN(x)O(y) films were studied with x-ray photoelectron spectroscopy (XPS), photothermal deflection spectroscopy (PDS), ultraviolet-visible (UV-VIS) optical transmittance spectra Raman spectra and electron spin resonance (ESR). Oxygen radical affects to a-CN(x) by etching, termination of defects and oxidation. A-CN(x)O(y) films are interesting for the application to luminescent materials and also to low dielectric constant materials.

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Document Details

Document Type
Technical Report
Publication Date
Apr 01, 2001
Accession Number
ADP012170

Entities

People

  • Hitoe Habuchi
  • Shoji Nitta
  • Yohko Naruse

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Band Gaps
  • Carbon Nanotubes
  • Dielectric Permittivity
  • Electron Spin Resonance
  • Energy Bands
  • Energy Gaps
  • Films
  • Fullerenes
  • Graphitic Materials
  • Materials
  • Nitrides
  • Oxynitrides
  • Raman Spectra
  • Refractive Index
  • Spectra
  • Spectroscopy
  • Spin Resonance

Fields of Study

  • Materials science

Readers

  • Combustion science or combustion engineering.
  • Gulf War Illness and Chronic Multisymptom Illness in Veterans.
  • Nanoscale Plasmonic Nanotechnology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene