In-Situ Analysis of the Chemical Vapor Synthesis of Nanocrystalline Silicon Carbide by Aerosol Mass Spectrometry

Abstract

An Aerosol Mass Spectrometer (AMS) is a combination of a Quadrupol- (QMS) and a Particle Mass Spectrometer (PMS) and enables the in-situ analysis of gas phase processes for the generation of nanoparticles. Size distributions of ultrafine silicon carbide particles in the range of 10 atomic mass units (amu) to amu are measured in the PMS. Simultaneously, molecular species up to 300 amu can be detected in the QMS. Aerosols containing nanocrystalline silicon carbide are produced from tetramethylsilane (TMS) by thermal decomposition. In situ process analysis with the AMS as a function of process parameters was performed to elucidate the formation and growth mechanism of SiC nanoparticles.

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Document Details

Document Type
Technical Report
Publication Date
Nov 01, 2001
Accession Number
ADP012198

Entities

People

  • Christian Janzen
  • Dirk Lindackers
  • Horst Hahn
  • In-kyum Lee
  • Markus Winterer

Organizations

  • Technical University of Darmstadt

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Ceramic Materials
  • Charged Particles
  • Decomposition
  • High Temperature
  • Kinetic Energy
  • Mass Spectrometers
  • Mass Spectrometry
  • Materials
  • Materials Science
  • Measurement
  • Molecular Beams
  • Nanocomposites
  • Nanoparticles
  • Particle Size
  • Particles
  • Silicon Carbide
  • Spectrometers

Fields of Study

  • Chemistry

Readers

  • Aerosol Science/Aerosol Physics
  • Surface Engineering/Surface Coating Technology.

Technology Areas

  • Biotechnology