Characterization of Self-Assembled SnO2 Nanoparticles for Fabrication of a High Sensitivity and High Selectivity Micro-Gas Sensor

Abstract

In order to refine further the material technology for tin-oxide based gas sensing we are exploring the use of precision nanoparticle deposition for the sensing layer. Layers of SnO2 nanoparticles were grown on Quartz Crystal Microbalance (QCM) resonators using the layer-by-layer self-assembly technique. Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM). and Electron Diffraction Pattern (EDP) analyses were performed on the self-assembled layers of SnO2 nanoparticles. The results showed that SnO2 nanoparticle films are deposited uniformly across the substrate. The size of the nanoparticles is estimated to be about 3-5 nm. Electrical characterization was done using standard current-voltage measurement technique, which revealed that SnO2 nanoparticle films exhibit ohmic behavior. Calcination experiments have also been carried out by baking the substrate (with self-assembled nanoparticles) in air at 350 deg C. Results show that 50%-70% of the polymer layers (which are deposited as precursor layers and also alternately in-between SnO2 nanoparticle monolayers) are eliminated during the process.

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Document Details

Document Type
Technical Report
Publication Date
Nov 01, 2001
Accession Number
ADP012217

Entities

People

  • R. C. Ghan
  • R. S. Besser
  • Y. Lvov

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Assembly
  • Chemical Reactions
  • Dielectric Gases
  • Elements
  • Fabrication
  • Films
  • Materials
  • Materials Laboratories
  • Materials Processing
  • Materials Testing
  • Nanocomposites
  • Nanoparticles
  • Nanotechnology
  • Quartz Crystal Microbalances
  • Self Assembly
  • Sensitivity
  • Thin Films

Fields of Study

  • Materials science

Readers

  • Electrochemical Surface Science
  • Nanocomposite Materials Science
  • Nanofabrication and Microfabrication.

Technology Areas

  • Biotechnology
  • Microelectronics
  • Microelectronics - Graphene