Innovative And Cost-Effective Microfabrication of Nanoceramic Components

Abstract

An innovative and cost-effective processing technique has been developed at Ceramatec Inc for the microfabrication of ceramic components requiring very high dimensional tolerance. The materials system is a proprietary nanophase composition called CERCANAM (CERamatec CAstable NAno Material). Scanning electron microscopy revealed that CERCANAM components can be fabricated with dimensional tolerance as high as +/- 2 micrometers for surface features on the die that have dimensions about 1 mm. The process can also be modified to fabricate nanoporous ceramic components with very high surface areas. Components with retained surface areas as high as 67-82% of the starting powder were fabricated. The fabrication process does not involve a high-temperature sintering step, which eliminates the loss of surface area from high temperature sintering. it is anticipated that microcomponents fabricated with specific microstructures and properties will have applications in the optical fiber industry as interconnects, in the electronic packaging industry and the chemical industry.

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Document Details

Document Type
Technical Report
Publication Date
Nov 01, 2001
Accession Number
ADP012223

Entities

People

  • Balakrishnan G. Nair

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Casting (Fabrication)
  • Castings
  • Ceramic Materials
  • Dry Etching
  • Fabrication
  • Heat Treatment
  • High Temperature
  • Low Temperature
  • Manufacturing
  • Materials
  • Materials Processing
  • Mechanical Properties
  • Microfabrication
  • Nanocomposites
  • Optical Fibers
  • Production Rate
  • Technical Information Centers

Readers

  • Integrated Circuit Design and Technology.
  • Nanoscale Plasmonic Nanotechnology
  • Reinforced Composite Materials

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene