Improvement of Crystallographic Characteristics of CoCrTa Thin Film Using Double Underlayer
Abstract
High c-axis oriented CoCr-based thin films are expected for ultra-high density recording media in perpendicular magnetic recording system. In order to improve dispersion angle of c-axis of CoCr-based for perpendicular magnetic recording media, we prepared trilayered film with double underlayer using New Facing Targets Sputtering apparatus. The thickness of magnetic layer CoCrTa and double underlayer, such as interlayer Pt, paramagnetic CoCr, underlayer Ti was fixed 50 nm and 20 nm respectively. In order to prepare the thin film, we fixed argon gas pressure 1 m Torr, substrate temperature 250 deg C and input current 0.5 A. The crystallographic characteristics of CoCrTa layer with varying interlayer thickness (0 - 20 nm) have been investigated. By the result, the CoCrTa trilayered thin film with interlayer Pt showed good c-axis orientation 3.45 and 3.62 at thickness 5 nm and 10 nm respectively. However, CoCrTa thin film using interlayer paramagnetic CoCr showed 8.28 deg and 8.62 deg at thickness nm and 10 nm respectively.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 2001
- Accession Number
- ADP012276
Entities
People
- K. H. Kim
- M. Naoe
- S. H. Kong
- S. Nakagawa
- Y. J. Kim