Depth Profiling of SiC Lattice Damage Using Micro-Raman Spectroscopy
Abstract
Depth profiling for the amount of lattice damage using a Confocal Micro-Raman (CMR) spectrometer is demonstrated in this paper. Samples of n-type silicon carbide were implanted with 2 MeV He and O ions at both room temperature and 500 deg C, and fluences between 10(exp 15) and 10(exp 17) ions/sq cm. Post-implantation annealing at 1000 deg C was also performed in order to study the damage evolution. Optical Absorption Spectrophotometry (OAS) was used for establishing the opacity (and therefore the probing depth) of the damaged layer to the 632.8 nm wavelength of the He-Ne laser used for CMR throughout this study. The methodology used and the results obtained are presented herein. Total dissipation of amorphous carbon islands was observed even at low annealing temperatures of the RT implanted samples, along with an increase in the size of the amorphous silicon islands.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2002
- Accession Number
- ADP012611
Entities
People
- Claudiu I. Muntele
- D. Ila
- Dale K Hensley
- David B. Poker
- Iulia C. Muntele
Organizations
- Alabama A & M College