New Approach Towards the Deposition of I-III-VI Thin Films

Abstract

The ternary chalcopyrite semiconductor Cu(In/Ga)(Se/S)2 is currently used as an absorber layer in high efficiency thin film solar cells. In this study, various types of I-III-VI (I = Cu, III = Ga or In, VI = S or Se) thin films (CuGaS2, CuInS2 and CuInSe2) were prepared from a series of organometallic precursors, M(S/Se)2CNMeRn (M = Cu, In, Ga; R = alkyl) by aerosol-assisted chemical vapour deposition (AACVD). In contrast to the metal alkyl compounds, MR3 (M = In and Ga; R = alkyl). which are pyrophoric, the precursors are easy to synthesize by one-pot reactions and are air stable. The optimum growth temperature for the preparation of these films on glass substrates using aerosol-assisted chemical vapour deposition (AACVD) was found to be above 400 deg C in terms of crystallinity, although deposition does occur at lower temperatures. The films have been characterised using XRPD, SEM and EDS. SEM analyses show all films are microcrystalline. XRPD results show evidence of the crystalline nature of theses films. The results of this comprehensive study are presented and discussed.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2002
Accession Number
ADP012612

Entities

People

  • David Crouch
  • Jin-ho Park
  • Mohammad Afzaal
  • Paul O'Brien

Organizations

  • University of Manchester

Tags

Communities of Interest

  • Advanced Electronics
  • Air Platforms

DTIC Thesaurus Topics

  • Advanced Materials
  • Chemical Compounds
  • Chemistry
  • Compound Semiconductors
  • Diffraction
  • Diffractometers
  • Electron Microscopy
  • Engineered Materials
  • Films
  • Flow Rate
  • Mass Spectra
  • Materials
  • Materials Science
  • Optical Materials
  • Particles
  • Semiconductors
  • Thin Films

Fields of Study

  • Materials science

Readers

  • Organic Chemistry
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene