Local Vibrational Modes of Carbon-Hydrogen Complexes in Proton Irradiated AlGaN

Abstract

Local vibrational modes (LVMs) of carbon-hydrogen (C-H) complexes in proton implanted AlGaN grown on sapphire by metalorganic chemical vapor deposition (MOCVD) were investigated using Fourier transform infrared (FTIR) spectroscopy. The LVMs exhibit five distinctive peaks in the spectral region of 2846 ^ 2963/cm, which are due to the symmetric and asymmetric stretching modes of C-H(sub n) (n=1-3). The LVMs intensities in doped AlGaN are increased as irradiation dose is increased in the entire irradiation dose range used without reaching the saturation stage. On the other hand, undoped samples show that LVMs intensity increase then either decreased or saturated as the irradiation dose is increased above 5 x 10(exp 16)/sq cm. Proton irradiation causes a drastic increase in the CH3 LVM while electron irradiation causes the opposite effect suggesting strongly that the observed LVMs are truly due to CH complexes.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2002
Accession Number
ADP012639

Entities

People

  • B. D. Weaver
  • M. O. Manasreh

Organizations

  • University of New Mexico

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Absorption
  • Absorption Spectra
  • Atomic Structure
  • Atoms
  • Band Gaps
  • Chemical Vapor Deposition
  • Detectors
  • Electron Irradiation
  • Fermi Levels
  • Light Sources
  • Materials
  • Measurement
  • Optoelectronic Devices
  • Power Electronics
  • Semiconductors
  • Spectra
  • Spectroscopy

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  • Nuclear and Radiation Engineering.
  • Quantum Chemistry
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene