Oxidation Kinetics and Microstructure of Wet-Oxidized MBF-Grown Short-Period AlGaAs Superlattices

Abstract

The kinetics of the wet oxidation process of MBE-grown high-Al-content AlAs/Al(0.6)Ga(0.4)As short-period superlattices (SPSLs) was investigated and compared to AlGaAs alloys and pure AlAs. We found that alloys and superlattices (SLs) have different oxidation characteristics. These differences were attributed to traces of the superlattice structure in the oxidized material. The microstructure and chemistry of SPSLs with an equivalent composition of Al(0.98)Ga(0.02)As was studied, using transmission electron microscopy, energy-dispersive x-ray spectroscopy, Rutherford backscattering, and nuclear reaction analysis for hydrogen-profiling. We also report on the mechanical stability of oxidized SPSL layers in optoelectronic device structures.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2002
Accession Number
ADP012665

Entities

People

  • Alexei Katsnelson
  • Katharine Dovidenko
  • Michael Yakimov
  • Rene Todt
  • Vadim Tokranov

Organizations

  • State University of New York at Albany

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Chemical Kinetics
  • Chemistry
  • Diffraction
  • Electron Beams
  • Electron Diffraction
  • Electron Microscopes
  • Electron Microscopy
  • Heat Of Activation
  • Hydrogen
  • Hydroxides
  • Kinetics
  • Materials
  • Microscopes
  • Microstructure
  • Nuclear Reactions
  • Optoelectronic Devices
  • Scanning Electron Microscopy

Fields of Study

  • Materials science

Readers

  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics