Ion Implantation Induced Interdiffusion in Quantum Wells for Optoelectronic Device Integration
Abstract
Ion implantation induced intermixing of GaAs/AlGaAs and InGaAs/AlGaAs quantum wells was studied using low temperature photoluminescence. Large energy shifts were observed with proton implantation and subsequent rapid thermal annealing. Energy shifts were found to be linear as a function of dose for doses as high as ^ 5 x 10(exp 16)/sq cm. Proton implantation and subsequent rapid thermal annealing was used to tune the emission wavelength of InGaAs quantum well lasers as well as detection wavelength of GaAs/AlGaAs quantum well infrared photodetectors (QWIPs). Emission wavelength of lasers showed blue shift whereas detection wavelength of QWIPs was red shifted with intermixing.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2002
- Accession Number
- ADP012669
Entities
People
- C. Jagadish
- H. H. Tan
- L. V. Dao
- Lin Fu
- M. I. Cohen
Organizations
- University of New South Wales