Transmission Characterization of Drilled Alternating-Layer Three-Dimensional Photonic Crystals

Abstract

We propose a new three-dimensional photonic crystal structure or drilled alternating-layer photonic crystal (DALPC), which can be fabricated by a combination of the deposition of alternating layers of dielectric films and one-time dry etching. Our band calculation predicts that the DALPC has a photonic band gap (PBG) in all directions. We fabricated a Si/SiO2 DALPC by electron beam lithography. bias sputtering, and fluoride-gas electron cyclotron resonance etching. We measured the light transmission of the DALPC sample in both the in-plane and vertical directions. We observed a transmission minimum around the 1.4-micrometers-wavelength for all measured directions and TE/TM polarizations, which demonstrated a potential of the DALPC as a three-dimensional PEG material.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2002
Accession Number
ADP012678

Entities

People

  • Chiharu Takahashi
  • Eiichi Kuramochi
  • Itaru Yokohama
  • Jun-ichi Takahashi
  • Masaya Notomi

Organizations

  • Tohoku University

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Assembly
  • Attenuation
  • Band Structures
  • Communication Systems
  • Electron Beam Lithography
  • Electron Microscopes
  • Energy Bands
  • Fabrication
  • Light Sources
  • Light Transmission
  • Lithography
  • Manufacturing
  • Optical Communications
  • Photonic Crystals
  • Scanning Electron Microscopes
  • Self Assembly
  • Three Dimensional

Fields of Study

  • Physics

Readers

  • Nanofabrication and Microfabrication.

Technology Areas

  • Directed Energy
  • Directed Energy - Pulsed-Laser Deposition
  • Microelectronics
  • Microelectronics - Graphene