Interference Lithography for 3D Photonic Band Gap Crystal Layer by Layer Fabrication

Abstract

We present fabrication of 3D photonic band gap woodpile crystals from photosensitive chalcogenide glass with the help of interference lithography and layer by layer construction. The alignment method is described, which is scalable to extremely small feature sizes required for photonic crystals in the visible region.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2002
Accession Number
ADP012679

Entities

People

  • A. Arsh
  • A. Feigel
  • B. Sfez
  • M. Klebanov
  • Z. Kotler

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Amorphous Materials
  • Band Gaps
  • Chalcogenide Glass
  • Construction
  • Crystals
  • Diffraction
  • Energy Bands
  • Fabrication
  • Glass
  • Materials
  • Optical Materials
  • Optical Phenomena
  • Optical Properties
  • Photonic Crystals
  • Refractive Index
  • Scattering
  • Semiconductors

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Nanofabrication and Microfabrication.