Interference Lithography for 3D Photonic Band Gap Crystal Layer by Layer Fabrication
Abstract
We present fabrication of 3D photonic band gap woodpile crystals from photosensitive chalcogenide glass with the help of interference lithography and layer by layer construction. The alignment method is described, which is scalable to extremely small feature sizes required for photonic crystals in the visible region.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 2002
- Accession Number
- ADP012679
Entities
People
- A. Arsh
- A. Feigel
- B. Sfez
- M. Klebanov
- Z. Kotler