Fabrication of Microstructures for Microphotonic Circuit

Abstract

We describe fabrication of sub-micron photonic bandgap structures on Si/SiO2 optical waveguide, which could be used at lambda = 1.54 micrometers.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 2002
Accession Number
ADP012682

Entities

People

  • D. G. Hasko
  • R. J. Mears
  • Subhasish Chakraborty

Organizations

  • University of Cambridge

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Band Gaps
  • Circuits
  • Electron Beam Lithography
  • Energy Bands
  • Etching
  • Fabrication
  • Materials
  • Microstructure
  • Optical Waveguides
  • Photonic Crystals
  • Photonic Devices
  • Reactive Ion Etching
  • Roughness
  • Simulations
  • Surface Roughness
  • Two Dimensional
  • Waveguides

Fields of Study

  • Physics