Correlated Dopant Distributions in Delta-Doped Layers
Abstract
In this paper we discuss the observation of correlations in the spatial distribution of Be atoms in delta doped layers. In Si delta doped samples we show that correlations in the charge distribution occur when DX centers are populated. The mobility enhancement we measure in our structures agrees with the calculated enhancement due to correlations effects.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1998
- Accession Number
- ADP012727
Entities
People
- P. M. Koenraad
Organizations
- Eindhoven University of Technology